. "\uC2A4\uD37C\uD130(Sputter)\uB294 \uC2A4\uD37C\uD130\uB9C1 \uBC29\uC2DD\uC73C\uB85C \uBC15\uB9C9\uC744 \uC81C\uC870\uD558\uB294 \uC7A5\uCE58\uB85C \uC9C4\uACF5 \uC0C1\uD0DC\uC5D0\uC11C \uC544\uB974\uACE4 \uAC00\uC2A4\uB97C \uC18C\uB7C9 \uC8FC\uC785\uD558\uACE0 \uD55C\uD3B8\uC5D0\uB294 \uC7AC\uB8CC \uBB3C\uC9C8\uC778 \uC6D0\uBC18\uD615 \uD0C0\uAC9F\uC744 \uB450\uACE0 \uBC18\uB300 \uCABD\uC5D0\uB294 \uAE30\uD310\uC744 \uB450\uACE0 \uB458 \uC0AC\uC774\uC5D0 \uC804\uC555\uC744 \uC778\uAC00\uD558\uB418 \uC9C1\uB958(DC)\uC640 \uB77C\uB514\uC624 \uC8FC\uD30C\uC218(rf), \uC911\uAC04\uC8FC\uD30C\uC218(mf)\uC758 \uBC29\uC2DD\uC73C\uB85C \uD55C\uB2E4. \uC804\uC555\uC774 \uC778\uAC00\uB418\uBA74 \uC544\uB974\uACE4\uC774 \uC774\uC628\uD654\uB418\uACE0 \uC804\uC555\uC5D0 \uC758\uD574 \uAC00\uC18D\uB418\uBA70 \uD0C0\uAC9F\uC5D0 \uBD80\uB52A\uD788\uAC8C \uB41C\uB2E4. \uC774\uB54C \uD0C0\uAC9F\uC758 \uC7AC\uB8CC\uAC00 \uD280\uC5B4\uB098\uC640\uC11C \uBC18\uB300\uCABD\uC5D0 \uC788\uB294 \uAE30\uD310\uC5D0 \uBD99\uC5B4\uC11C \uC131\uC7A5\uD558\uAC8C \uB418\uC5B4 \uB9CC\uB4E4\uC5B4\uC9C4 \uAC83\uC744 \uBC15\uB9C9\uC774\uB77C\uD55C\uB2E4. \uD0C0\uAC9F\uC758 \uC774\uBA74\uC5D0 \uD2B9\uC218\uD55C \uC790\uC11D\uC744 \uBD99\uC5EC\uC11C \uD6A8\uC728\uC744 \uD5A5\uC0C1\uC2DC\uD0A8\uB2E4. \uBD88\uD65C\uC131 \uAE30\uCCB4\uB85C \uC544\uB974\uACE4 \uC774\uC678\uC5D0 \uD06C\uC138\uB17C\uC774 \uC0AC\uC6A9\uB418\uAE30\uB3C4 \uD55C\uB2E4. \uC0B0\uC18C, \uC9C8\uC18C\uB4F1\uC758 \uBC18\uC751\uC131 \uAE30\uCCB4\uB97C \uCCA8\uAC00\uD558\uC5EC \uBC18\uC751\uC131 \uC2A4\uD37C\uD130\uB9C1\uC744 \uD558\uC5EC \uC0B0\uD654\uBB3C\uACFC \uC9C8\uD654\uBB3C \uBC15\uB9C9\uC744 \uC81C\uC870\uD55C\uB2E4."@ko . . . "\uC2A4\uD37C\uD130(Sputter)\uB294 \uC2A4\uD37C\uD130\uB9C1 \uBC29\uC2DD\uC73C\uB85C \uBC15\uB9C9\uC744 \uC81C\uC870\uD558\uB294 \uC7A5\uCE58\uB85C \uC9C4\uACF5 \uC0C1\uD0DC\uC5D0\uC11C \uC544\uB974\uACE4 \uAC00\uC2A4\uB97C \uC18C\uB7C9 \uC8FC\uC785\uD558\uACE0 \uD55C\uD3B8\uC5D0\uB294 \uC7AC\uB8CC \uBB3C\uC9C8\uC778 \uC6D0\uBC18\uD615 \uD0C0\uAC9F\uC744 \uB450\uACE0 \uBC18\uB300 \uCABD\uC5D0\uB294 \uAE30\uD310\uC744 \uB450\uACE0 \uB458 \uC0AC\uC774\uC5D0 \uC804\uC555\uC744 \uC778\uAC00\uD558\uB418 \uC9C1\uB958(DC)\uC640 \uB77C\uB514\uC624 \uC8FC\uD30C\uC218(rf), \uC911\uAC04\uC8FC\uD30C\uC218(mf)\uC758 \uBC29\uC2DD\uC73C\uB85C \uD55C\uB2E4. \uC804\uC555\uC774 \uC778\uAC00\uB418\uBA74 \uC544\uB974\uACE4\uC774 \uC774\uC628\uD654\uB418\uACE0 \uC804\uC555\uC5D0 \uC758\uD574 \uAC00\uC18D\uB418\uBA70 \uD0C0\uAC9F\uC5D0 \uBD80\uB52A\uD788\uAC8C \uB41C\uB2E4. \uC774\uB54C \uD0C0\uAC9F\uC758 \uC7AC\uB8CC\uAC00 \uD280\uC5B4\uB098\uC640\uC11C \uBC18\uB300\uCABD\uC5D0 \uC788\uB294 \uAE30\uD310\uC5D0 \uBD99\uC5B4\uC11C \uC131\uC7A5\uD558\uAC8C \uB418\uC5B4 \uB9CC\uB4E4\uC5B4\uC9C4 \uAC83\uC744 \uBC15\uB9C9\uC774\uB77C\uD55C\uB2E4. \uD0C0\uAC9F\uC758 \uC774\uBA74\uC5D0 \uD2B9\uC218\uD55C \uC790\uC11D\uC744 \uBD99\uC5EC\uC11C \uD6A8\uC728\uC744 \uD5A5\uC0C1\uC2DC\uD0A8\uB2E4. \uBD88\uD65C\uC131 \uAE30\uCCB4\uB85C \uC544\uB974\uACE4 \uC774\uC678\uC5D0 \uD06C\uC138\uB17C\uC774 \uC0AC\uC6A9\uB418\uAE30\uB3C4 \uD55C\uB2E4. \uC0B0\uC18C, \uC9C8\uC18C\uB4F1\uC758 \uBC18\uC751\uC131 \uAE30\uCCB4\uB97C \uCCA8\uAC00\uD558\uC5EC \uBC18\uC751\uC131 \uC2A4\uD37C\uD130\uB9C1\uC744 \uD558\uC5EC \uC0B0\uD654\uBB3C\uACFC \uC9C8\uD654\uBB3C \uBC15\uB9C9\uC744 \uC81C\uC870\uD55C\uB2E4."@ko . . . "\uC2A4\uD37C\uD130\uB9C1"@ko . .