"\uC8FC\uC0AC \uC804\uC790 \uD604\uBBF8\uACBD(Scanning Electron Microscope,SEM)\uC740 \uAD11\uD559 \uD604\uBBF8\uACBD\uACFC \uC720\uC0AC\uD558\uB2E4. \uC8FC\uC0AC \uC804\uC790 \uD604\uBBF8\uACBD(SEM)\uC740 \uAD11\uC6D0\uACFC \uC218\uB834 \uB80C\uC988, \uB300\uBB3C \uB80C\uC988\uB85C \uAD6C\uC131\uB418\uBA70, \uC2DC\uB8CC\uC758 \uD45C\uBA74\uC5D0\uC11C \uBC18\uC0AC\uB41C \uBE5B\uC744 \uC0AC\uC6A9\uD558\uC5EC \uC601\uC0C1\uC744 \uB9CC\uB4DC\uB294 \uC804\uCCB4\uC801\uC778 \uAD6C\uC131\uC740 \uAD11\uD559 \uD604\uBBF8\uACBD\uACFC \uC720\uC0AC\uD558\uB2E4. \uC9C4\uACF5 \uC7A5\uCE58\uC640 \uC804\uC790 \uC7A5\uCE58\uC758 \uD569\uCE5C \uC7A5\uBE44\uB77C \uC798\uBABB\uD558\uBA74 \uC77C\uC21C\uAC04 \uC601\uAD6C\uC190\uC0C1\uC73C\uB85C \uD070\uC77C\uB098 \uBC84\uB9B0\uB2E4. SEM \uC774\uB780 \uACE0\uC9C4\uACF5\uC911\uC5D0 \uB193\uC5EC\uC9C4 \uC2DC\uB8CC\uD45C\uBA74\uC744 1-100nm\uC815\uB3C4\uC758 \uBBF8\uC138\uD55C\uC804\uC790\uC120\uC73C\uB85C x-y\uC758 \uC774\uCC28\uC6D0\uBC29\uD5A5\uC73C\uB85C \uC8FC\uC0AC\uD558\uC5EC \uC2DC\uB8CC\uD45C\uBA74\uC5D0\uC11C \uBC1C\uC0DD\uD558\uB294 2\uCC28\uC804\uC790, \uBC18\uC0AC\uC804\uC790,\uD22C\uACFC\uC804\uC790, \uAC00\uC2DC\uAD11, \uC801\uC678\uC120, X\uC120, \uB0B4\uBD80\uAE30\uC804\uB825\uB4F1\uC758 \uC2E0\uD638\uB97C \uAC80\uCD9C\uD55C\uB2E4. \uC8FC\uC0AC\uC804\uC790\uD604\uBBF8\uACBD\uC740 \uD06C\uAC8C 3\uAC1C\uC758 \uC81C\uD488\uC73C\uB85C \uB098\uB20C \uC218 \uC788\uB294\uB370 FE-SEM(Field Emission SEM), Normal-SEM, Mini-SEM\uC774\uB2E4. \uAD00\uCC30\uB300\uC0C1\uC5D0 \uC804\uC790\uC120\uC744 \uC3D8\uC5EC \uC2DC\uB8CC\uC5D0\uC11C \uBC18\uC0AC\uB418\uC5B4 \uB098\uC628 \uC804\uC790\uC5D0\uC11C \uC5BB\uC5B4\uC9C0\uB294 \uC0C1\uC744 \uAD00\uCC30\uD558\uB294 \uAC83\uC774\uB2E4. \uC8FC\uC0AC\uC804\uC790\uD604\uBBF8\uACBD\uC740 1938\uB144 Von Arddenne\uC5D0 \uC758\uD574 \uB9CC\uB4E4\uC5B4\uC84C\uB2E4. \uCCAB\uBC88\uC9F8 \uC8FC\uC0AC \uC804\uC790 \uD604\uBBF8\uACBD\uC740 1942\uB144 Zworykin et al. \uC5D0 \uC758\uD574\uC11C \uAC1C\uBC1C\uB418\uC5C8\uB2E4."@ko . "\uC8FC\uC0AC \uC804\uC790 \uD604\uBBF8\uACBD(Scanning Electron Microscope,SEM)\uC740 \uAD11\uD559 \uD604\uBBF8\uACBD\uACFC \uC720\uC0AC\uD558\uB2E4. \uC8FC\uC0AC \uC804\uC790 \uD604\uBBF8\uACBD(SEM)\uC740 \uAD11\uC6D0\uACFC \uC218\uB834 \uB80C\uC988, \uB300\uBB3C \uB80C\uC988\uB85C \uAD6C\uC131\uB418\uBA70, \uC2DC\uB8CC\uC758 \uD45C\uBA74\uC5D0\uC11C \uBC18\uC0AC\uB41C \uBE5B\uC744 \uC0AC\uC6A9\uD558\uC5EC \uC601\uC0C1\uC744 \uB9CC\uB4DC\uB294 \uC804\uCCB4\uC801\uC778 \uAD6C\uC131\uC740 \uAD11\uD559 \uD604\uBBF8\uACBD\uACFC \uC720\uC0AC\uD558\uB2E4. \uC9C4\uACF5 \uC7A5\uCE58\uC640 \uC804\uC790 \uC7A5\uCE58\uC758 \uD569\uCE5C \uC7A5\uBE44\uB77C \uC798\uBABB\uD558\uBA74 \uC77C\uC21C\uAC04 \uC601\uAD6C\uC190\uC0C1\uC73C\uB85C \uD070\uC77C\uB098 \uBC84\uB9B0\uB2E4. SEM \uC774\uB780 \uACE0\uC9C4\uACF5\uC911\uC5D0 \uB193\uC5EC\uC9C4 \uC2DC\uB8CC\uD45C\uBA74\uC744 1-100nm\uC815\uB3C4\uC758 \uBBF8\uC138\uD55C\uC804\uC790\uC120\uC73C\uB85C x-y\uC758 \uC774\uCC28\uC6D0\uBC29\uD5A5\uC73C\uB85C \uC8FC\uC0AC\uD558\uC5EC \uC2DC\uB8CC\uD45C\uBA74\uC5D0\uC11C \uBC1C\uC0DD\uD558\uB294 2\uCC28\uC804\uC790, \uBC18\uC0AC\uC804\uC790,\uD22C\uACFC\uC804\uC790, \uAC00\uC2DC\uAD11, \uC801\uC678\uC120, X\uC120, \uB0B4\uBD80\uAE30\uC804\uB825\uB4F1\uC758 \uC2E0\uD638\uB97C \uAC80\uCD9C\uD55C\uB2E4. \uC8FC\uC0AC\uC804\uC790\uD604\uBBF8\uACBD\uC740 \uD06C\uAC8C 3\uAC1C\uC758 \uC81C\uD488\uC73C\uB85C \uB098\uB20C \uC218 \uC788\uB294\uB370 FE-SEM(Field Emission SEM), Normal-SEM, Mini-SEM\uC774\uB2E4. \uAD00\uCC30\uB300\uC0C1\uC5D0 \uC804\uC790\uC120\uC744 \uC3D8\uC5EC \uC2DC\uB8CC\uC5D0\uC11C \uBC18\uC0AC\uB418\uC5B4 \uB098\uC628 \uC804\uC790\uC5D0\uC11C \uC5BB\uC5B4\uC9C0\uB294 \uC0C1\uC744 \uAD00\uCC30\uD558\uB294 \uAC83\uC774\uB2E4. \uC8FC\uC0AC\uC804\uC790\uD604\uBBF8\uACBD\uC740 1938\uB144 Von Arddenne\uC5D0 \uC758\uD574 \uB9CC\uB4E4\uC5B4\uC84C\uB2E4. \uCCAB\uBC88\uC9F8 \uC8FC\uC0AC \uC804\uC790 \uD604\uBBF8\uACBD\uC740 1942\uB144 Zworykin et al. \uC5D0 \uC758\uD574\uC11C \uAC1C\uBC1C\uB418\uC5C8\uB2E4."@ko . . . "\uC8FC\uC0AC \uC804\uC790 \uD604\uBBF8\uACBD"@ko . . .