. "\uD0C4\uD0C8\uB968 \uC0B0\uD654\uBB3C \uC758 \uD654\uD559\uC2DD Ta2O5 \uC774\uB2E4. \uC0AC\uBC29\uC815\uACC4\uC640 \uD5E5\uC0AC\uACE0\uB110 \uC704\uC0C1\uC774 \uC54C\uB824\uC838 \uC788\uB2E4. Ta2O5\uB294 \uAC00\uAE4C\uC6B4 UV\uC5D0\uC11C IR \uBD84\uAD11 \uC601\uC5ED\uC5D0 \uC720\uC6A9\uD55C \uACE0\uAD74\uC808, \uC800\uD761\uC218 \uBB3C\uC9C8\uC774\uB2E4. \uADF8\uAC83\uC740 \uB2E8\uC9C0 1470 \u00B0C \uC774\uC0C1\uC758 \uC628\uB3C4\uC5D0\uC11C \uD658\uC6D0\uB41C\uB2E4. Ta2O5\uB294 \uC804\uC790\uACF5\uD559\uC5D0\uC11C \uBC15\uB9C9 \uACE0\uC18D \uCEE4\uD328\uC2DC\uD130\uB97C \uB9CC\uB4DC\uB294 \uB370 \uC0AC\uC6A9\uB41C\uB2E4. 1990\uB144\uB300\uC5D0 DRAM \uCEE4\uD328\uC2DC\uD130 \uC751\uC6A9\uC744 \uC704\uD574 \uC5F0\uAD6C\uB418\uC5C8\uB2E4. \uACE0 k \uC720\uC804\uCCB4\uB85C \uD0C4\uD0C8\uB968 \uC0B0\uD654\uBB3C\uC5D0 \uAD00\uD55C \uAC15\uB825\uD55C \uC5F0\uAD6C \uAD00\uC2EC\uC774 \uC788\uC5C8\uB2E4. \uADF8 \uB192\uC740 \uAD74\uC808\uB960 \uB54C\uBB38\uC5D0 Ta2O55\uB294 \uC0AC\uC9C4\uAE30 \uB80C\uC988\uC758 \uC720\uB9AC \uC81C\uC870\uC5D0 \uC0AC\uC6A9\uB418\uC5C8\uB2E4. \uADF8\uAC83\uC740 \uADF8 \uC54C\uCF55\uC0AC\uC774\uB4DC\uC758 \uAC00\uC218\uBD84\uD574\uC5D0 \uC758\uD574 \uD569\uC131\uB420 \uC218 \uC788\uB2E4. 2 Ta(OCH2CH3)5 + 5 H2O \u2192 Ta2O5 + 10 HOCH2CH3"@ko . . "\uC0B0\uD654 \uD0C4\uD0C8\uB968"@ko . "\uD0C4\uD0C8\uB968 \uC0B0\uD654\uBB3C \uC758 \uD654\uD559\uC2DD Ta2O5 \uC774\uB2E4. \uC0AC\uBC29\uC815\uACC4\uC640 \uD5E5\uC0AC\uACE0\uB110 \uC704\uC0C1\uC774 \uC54C\uB824\uC838 \uC788\uB2E4. Ta2O5\uB294 \uAC00\uAE4C\uC6B4 UV\uC5D0\uC11C IR \uBD84\uAD11 \uC601\uC5ED\uC5D0 \uC720\uC6A9\uD55C \uACE0\uAD74\uC808, \uC800\uD761\uC218 \uBB3C\uC9C8\uC774\uB2E4. \uADF8\uAC83\uC740 \uB2E8\uC9C0 1470 \u00B0C \uC774\uC0C1\uC758 \uC628\uB3C4\uC5D0\uC11C \uD658\uC6D0\uB41C\uB2E4. Ta2O5\uB294 \uC804\uC790\uACF5\uD559\uC5D0\uC11C \uBC15\uB9C9 \uACE0\uC18D \uCEE4\uD328\uC2DC\uD130\uB97C \uB9CC\uB4DC\uB294 \uB370 \uC0AC\uC6A9\uB41C\uB2E4. 1990\uB144\uB300\uC5D0 DRAM \uCEE4\uD328\uC2DC\uD130 \uC751\uC6A9\uC744 \uC704\uD574 \uC5F0\uAD6C\uB418\uC5C8\uB2E4. \uACE0 k \uC720\uC804\uCCB4\uB85C \uD0C4\uD0C8\uB968 \uC0B0\uD654\uBB3C\uC5D0 \uAD00\uD55C \uAC15\uB825\uD55C \uC5F0\uAD6C \uAD00\uC2EC\uC774 \uC788\uC5C8\uB2E4. \uADF8 \uB192\uC740 \uAD74\uC808\uB960 \uB54C\uBB38\uC5D0 Ta2O55\uB294 \uC0AC\uC9C4\uAE30 \uB80C\uC988\uC758 \uC720\uB9AC \uC81C\uC870\uC5D0 \uC0AC\uC6A9\uB418\uC5C8\uB2E4. \uADF8\uAC83\uC740 \uADF8 \uC54C\uCF55\uC0AC\uC774\uB4DC\uC758 \uAC00\uC218\uBD84\uD574\uC5D0 \uC758\uD574 \uD569\uC131\uB420 \uC218 \uC788\uB2E4. 2 Ta(OCH2CH3)5 + 5 H2O \u2192 Ta2O5 + 10 HOCH2CH3"@ko .