. "\uC2E4\uB780(silane) \uB610\uB294 \uC218\uC18C\uD654\uADDC\uC18C\uB294 \uADDC\uC18C \uC6D0\uC790\uC640 \uC218\uC18C \uC6D0\uC790\uAC00 \uACF5\uC720\uACB0\uD569\uD558\uC5EC \uB9CC\uB4E0 \uD654\uD569\uBB3C\uC774\uB2E4. n\uAC1C\uC758 \uADDC\uC18C \uC6D0\uC790\uC5D0 2n+2\uAC1C\uC758 \uC218\uC18C \uC6D0\uC790\uAC00 \uACB0\uD569\uD55C \uD654\uD569\uBB3C\uC758 \uC77C\uBC18\uC2DD\uC740 SinH2n+2(n=1, 2, 3\u2026\u2026)\uC774\uB2E4. \uC2E4\uB780\uC740 \uAD6C\uC870\uC801\uC73C\uB85C \uD3EC\uD654 \uD0C4\uD654\uC218\uC18C\uC640 \uC720\uC0AC\uD558\uB098 \uB9E4\uC6B0 \uBD88\uC548\uC815\uD558\uB2E4. \uBC15\uB9C9\uD615 \uD0DC\uC591\uAD11\uC804\uC9C0 \uC0DD\uC0B0\uB7C9\uC774 \uB298\uBA74\uC11C \uD575\uC2EC\uC18C\uC7AC\uC778 '\uBAA8\uB178\uC2E4\uB780'\uC5D0 \uB300\uD55C \uAD00\uC2EC\uC774 \uACE0\uC870\uB410\uB2E4. \uBAA8\uB178\uC2E4\uB780\uC740 \uD2B8\uB79C\uC9C0\uC2A4\uD130 \uC0DD\uC131\uC2DC \uAE30\uD310\uC5D0 \uC0B0\uD654\uB9C9\uC744 \uD615\uC131\uD558\uB294\uB370 \uC4F0\uC774\uB294 \uD2B9\uC218 \uAC00\uC2A4\uB2E4. 2009\uB144 6\uC6D4 \uAD6D\uB0B4 \uC911\uC18C\uAE30\uC5C5\uC774 \uD0DC\uC591\uC804\uC9C0\uC6A9 \uD3F4\uB9AC\uC2E4\uB9AC\uCF58 \uC81C\uC870 \uD575\uC2EC\uC7A5\uBE44\uC778 '\uBAA8\uB178\uC2E4\uB780(SiH?)\uC6A9 \uD654\uD559\uAE30\uC0C1\uC99D\uCC29\uBC18\uC751\uAE30(CVD\uB9AC\uC561\uD130)'\uB97C \uAD6D\uC0B0\uD654 \uD558\uB294\uB370 \uC131\uACF5\uD588\uB2E4. \uD0DC\uC591 \uC804\uC9C0 \uAD00\uB828 \uD22C\uC790 \uC5EC\uAC74 \uD65C\uC131\uD654\uB85C \uCC28\uC138\uB300 \uC218\uC775\uC6D0\uC778 \uBAA8\uB178\uC2E4\uB780(SiH4)\uC758 \uC218\uC694 \uC804\uB9DD\uC774 \uBC1D\uC544\uC84C\uB2E4. 2009\uB144 11\uB2EC 29\uC77C \uC77C\uBCF8\uC758 \uC911\uC694 \uACF5\uC5C5\uC6A9 \uAC1C\uC2A4 \uC0DD\uC0B0\uC5C5\uCCB4\uC778 Taiyo Nippon Sanso corp.\uAC00 \uB3C5\uC77C\uC758 Evonik\uAC00 \uAC1C\uBC1C\uD55C \uBAA8\uB178\uC2E4\uB780 \uC0DD\uC0B0\uBC29\uC2DD\uC744 \uB3C4\uC785\uD574 \uC57D 1\uC5B55\uCC9C\uB9CC\uC720\uB85C\uB97C \uD22C\uC790\uD574 Yokkaichi \uC5D0 \uC0C8\uB85C\uC6B4 \uBAA8\uB178\uC2E4\uB780\uC0DD\uC0B0 \uACF5\uC7A5\uC744 \uAC74\uC124\uD558\uAE30 \uC2DC\uC791\uD588\uC2B5\uB2C8\uB2E4."@ko . "\uC2E4\uB780(silane) \uB610\uB294 \uC218\uC18C\uD654\uADDC\uC18C\uB294 \uADDC\uC18C \uC6D0\uC790\uC640 \uC218\uC18C \uC6D0\uC790\uAC00 \uACF5\uC720\uACB0\uD569\uD558\uC5EC \uB9CC\uB4E0 \uD654\uD569\uBB3C\uC774\uB2E4. n\uAC1C\uC758 \uADDC\uC18C \uC6D0\uC790\uC5D0 2n+2\uAC1C\uC758 \uC218\uC18C \uC6D0\uC790\uAC00 \uACB0\uD569\uD55C \uD654\uD569\uBB3C\uC758 \uC77C\uBC18\uC2DD\uC740 SinH2n+2(n=1, 2, 3\u2026\u2026)\uC774\uB2E4. \uC2E4\uB780\uC740 \uAD6C\uC870\uC801\uC73C\uB85C \uD3EC\uD654 \uD0C4\uD654\uC218\uC18C\uC640 \uC720\uC0AC\uD558\uB098 \uB9E4\uC6B0 \uBD88\uC548\uC815\uD558\uB2E4. \uBC15\uB9C9\uD615 \uD0DC\uC591\uAD11\uC804\uC9C0 \uC0DD\uC0B0\uB7C9\uC774 \uB298\uBA74\uC11C \uD575\uC2EC\uC18C\uC7AC\uC778 '\uBAA8\uB178\uC2E4\uB780'\uC5D0 \uB300\uD55C \uAD00\uC2EC\uC774 \uACE0\uC870\uB410\uB2E4. \uBAA8\uB178\uC2E4\uB780\uC740 \uD2B8\uB79C\uC9C0\uC2A4\uD130 \uC0DD\uC131\uC2DC \uAE30\uD310\uC5D0 \uC0B0\uD654\uB9C9\uC744 \uD615\uC131\uD558\uB294\uB370 \uC4F0\uC774\uB294 \uD2B9\uC218 \uAC00\uC2A4\uB2E4. 2009\uB144 6\uC6D4 \uAD6D\uB0B4 \uC911\uC18C\uAE30\uC5C5\uC774 \uD0DC\uC591\uC804\uC9C0\uC6A9 \uD3F4\uB9AC\uC2E4\uB9AC\uCF58 \uC81C\uC870 \uD575\uC2EC\uC7A5\uBE44\uC778 '\uBAA8\uB178\uC2E4\uB780(SiH?)\uC6A9 \uD654\uD559\uAE30\uC0C1\uC99D\uCC29\uBC18\uC751\uAE30(CVD\uB9AC\uC561\uD130)'\uB97C \uAD6D\uC0B0\uD654 \uD558\uB294\uB370 \uC131\uACF5\uD588\uB2E4. \uD0DC\uC591 \uC804\uC9C0 \uAD00\uB828 \uD22C\uC790 \uC5EC\uAC74 \uD65C\uC131\uD654\uB85C \uCC28\uC138\uB300 \uC218\uC775\uC6D0\uC778 \uBAA8\uB178\uC2E4\uB780(SiH4)\uC758 \uC218\uC694 \uC804\uB9DD\uC774 \uBC1D\uC544\uC84C\uB2E4. 2009\uB144 11\uB2EC 29\uC77C \uC77C\uBCF8\uC758 \uC911\uC694 \uACF5\uC5C5\uC6A9 \uAC1C\uC2A4 \uC0DD\uC0B0\uC5C5\uCCB4\uC778 Taiyo Nippon Sanso corp.\uAC00 \uB3C5\uC77C\uC758 Evonik\uAC00 \uAC1C\uBC1C\uD55C \uBAA8\uB178\uC2E4\uB780 \uC0DD\uC0B0\uBC29\uC2DD\uC744 \uB3C4\uC785\uD574 \uC57D 1\uC5B55\uCC9C\uB9CC\uC720\uB85C\uB97C \uD22C\uC790\uD574 Yokkaichi \uC5D0 \uC0C8\uB85C\uC6B4 \uBAA8\uB178\uC2E4\uB780\uC0DD\uC0B0 \uACF5\uC7A5\uC744 \uAC74\uC124\uD558\uAE30 \uC2DC\uC791\uD588\uC2B5\uB2C8\uB2E4."@ko . "\uC2E4\uB780"@ko . .